Angstrom Advanced PHE-104 Infrared Spectroscopic Ellipsometer

 

Angstrom Advanced PHE-104 Infrared Spectroscopic Ellipsometer

 

Parameters：

Wavelength: 4000-400cm-1(2.5-25um)

Beam size: 1X34mm

Automated incident angle：35° to 90°，0.01°/Step

Functions/Features：

Film’s thickness, N & K measurement;

Resistivity measurements and doping profiles;

Identification of chemical bonds and buried layers investigation ;

Transmittance and reflectance;

 

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